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NXQ Mask Alignment光刻机

型    号:NXQ4000系列
报    价: 市场价:
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MYCROYUANZHUANGJINKOUMEIGUOENKEYOUNXQXILIEGUANGKEJI(Mask Aligner),SHIQUANQIUYOUYUEDEGUANGKEXITONG,ZAIGUANGKELINGYUYOUCHAOGUO35NIANDEJINGYAN,QUANQIUSHOUCHU1000DUOTAOSHEBEI,WEIBANDAOTIZHIZAOHEKEYANLINGYUTIGONGPINZHIYOULIANGWENDINGDEQUANBODUANZIWAIGUANGKEJIXITONG,GUANGFANDEYINGYONGYUBANDAOTIGUANGKEGONGYIZHICHENG、WEIJIDIANMEMS、ERJIGUANXINPIAN、FAGUANGERJITI(LED)XINPIANZHIZAO、SHENGWUQIJIAN、NAMIKEJI、XIANSHIMIANBANLCD、GUANGDIANQIJIAN、NAIMIYAYINYIJIDIANZIFENGZHUANGDENGZHUDUOLINGYU。

NXQ Mask Alignment光刻机产品概述:

海南七星彩论坛 ENKEYOUGUANGKEJIFENWEIBANZIDONGHEQUANZIDONGLIANGDAXILIE。QIZHONG,NXQ4000XILIEGUANGKEJISHIYIBANZIDONGXITONGWEIZHU。GAIXITONGYOUYUEDECAOZUOXING,CHAOGAODEFENBIANLV,JUNYUNDEGUANGXUEXITONG,WENDINGDEJIEJINSHIHEJIECHUSHIGUANGKEJICHAOGAODEXINGJIABI,SHIENKEYOUGUANGKEXITONGYIJINGBEIQUANGUOGEDIZHONGDUOZHUMINGQIYE、YANFAZHONGXIN、YANJIUSUOHEGAOXIAOCAIYONG。

二、技术参数:

1、XINPIANCHICUN:5mm~150mmDEYUANPIAN/FANGPIANHEBUGUIZESUIPIAN(ZHICHIDUIBUGUIZESUIPIANDETESHUKAPANSHEJI);

海南七星彩论坛2、PUGUANGBOZHANG:350nm-450nm(QITABOZHANGKEXUANPEI);

海南七星彩论坛3、GONGDENGGONGLV:350W/500W(QITAGONGLVKEXUANPEI);

4、FENBIANLV:YOUYU0.5um;

海南七星彩论坛5、PUGUANGMOSHI:ZHICHIJIEJINSHIPUGUANG,GEZHONGJIECHUSHI(ZHENKONGJIECHU、RUANJIECHU、YINGJIECHUDENG)PUGUANG;

海南七星彩论坛6、CHUSHEGUANGQIANGFANWEI:10mW/cm2~55mW/cm2@405nm;

7、ZHICHIHENGDINGGUANGQIANGHUOHENGDINGGONGLVMOSHI;

8、PUGUANGSHIJIAN:0.1~999.9s;

海南七星彩论坛9、DUIZHUNJINGDU:SHUANGGAOQINGCAISECCD + SHUANGGAOQINGCAISEJIANSHIQI,DUIZHUNJINGDUKEDADAO0.4WEIMINEI;

10、YANMOCHICUN:2 x 2YINGCUNDAO 9 x 9YINGCUN(2 x 2YINGCUNXUYAOYANMOZHUANHUANQI);

11、GUANGQIANGJUNYUNXINGUniformity:

<±1% over 2” QUYU;

<±2% over 4” QUYU;

<±3% over 6” QUYU;

12、SHUANGMIANGUANGKE:JUBEIBEIMIANHONGWAIDUIZHUN(IR BSA)HEGUANGXUEBEIMIANDUIZHUN(OBS BSA),SHUANGMIANDUIZHUNJINGDU≤2μm;

13、DIANYUAN:GAOLINGMINDUGUANGQIANGKEKONGDIANYUAN。

KEXUANXINGHAO:

NXQ400-6  

NXQ400-8

NXQ800-6

NXQ8006 Sapphire

NXQ800-8

SAN、CHANPINTEDIAN:

海南七星彩论坛KEXUANZHICHIDANMIANDUIZHUNHESHUANGMIANDUIZHUNSHEJI;

海南七星彩论坛GAOQINGXICAISESHUANGCCDJINGTOUCAIYONGXIANJINDEFENLIESHICHANGXIANWEIJINGJINGTOU(JIYUWUXIANYUANXIUZHENGDECCDJINGTOUSHEJI);SHUANGTOUGAOQINGQUANCAIWUJING(DANSHICHANGHUOFENLIESHICHANGKEGONGYONGHULINGHUOXUANZE);

GAOQINGCAISESHUANGXIANSHIPING;

全新气动轴承导轨海南七星彩论坛设计,高精准,低磨损,无需售后维护的;

具有自动执行楔形误差补偿,并在找平后自动定位功能;

操作简易,具有支持多操作员同台使用的友好操作界面;

操控手柄调控模式的独特设计;

采用LED穿透物镜照明技术,具有超强对准亮度;

采用基于无限远修正的显微镜镜头架构;

抗衍射反射的高效光学光路设计;

带安全保护功能的温度和气流传感器;

QUANJINGZHUNZHITOUJINGGUANGXIANPIANCHABANJIAO: <1.84DU;

SHEBEIWENDINGXING,NAIYONGXINGCHAOGAO;

产品相关关键字: 恩科优光刻机 紫外曝光机 掩膜曝光机 掩膜对准曝光系统 全自动光刻机

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